This project aims to design a high-contrast dielectric grating operating under normal incidence to excite dual-mode Fano resonances with high quality factors, where the strong electromagnetic fields are primarily localized on the grating surface. We plan to integrate this grating with a high-power microwave source (>1 kW) to realize an open-type microwave heating system. After completing the design, multiphysics simulations will be employed to evaluate the heating dynamics and annealing performance of various semiconductor materials within the proposed system. We expect that the developed microwave heating platform will not only achieve high heating efficiency (due to its high-Q resonance characteristics) but will also be suitable for large-area and batch-type thermal processing owing to its open-system configuration. This project focuses primarily on fundamental scientific research, with potential applications through industrial collaboration. It is expected to train several master’s and doctoral students capable of independent research and creative thinking, thereby contributing skilled talents to both academia and industry in Taiwan. The research involves extensive use of theoretical modeling—such as waveguide-array mode coupling analysis—for designing broadband total-reflection gratings, dual-mode Fano-resonant gratings, and single-mode Fano-resonant gratings. Numerical computation and algorithm development will be crucial tools for analyzing these models, allowing the participating researchers to gain solid training in both theoretical physics and computational programming. Since the fabrication of such gratings requires classical semiconductor lithography and etching techniques or precision machining, the research team will also acquire practical knowledge of advanced microfabrication and processing technologies. Furthermore, as all fabricated components will be characterized using optical transmission and reflection measurement systems, the setup, calibration, and operation of these optical instruments will provide valuable training in microwave and terahertz optics, optical system design, and spectroscopy. Overall, this project is expected to cultivate interdisciplinary experts in the fields of microwaves, terahertz waves, optics, and materials science. You can find out more about the LIGHT-AIM Lab at https://sites.google.com/view/light-aim/%E4%B8%BB%E9%A0%81